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1 Ergebnisse
1
A Micromachined Resonant Low-Pressure Sensor Using an Islan..:
, In:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
,
Zheng, Yu
;
Zhang, Sen
;
Chen, Deyong
.. - p. 1243-1246 , 2021
Link:
https://doi.org/10.1109/Transducers50396.2021.9495737
RT T1 <cTitle>2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)</cTitle>: T1 <Title>A Micromachined Resonant Low-Pressure Sensor Using an Island-Diaphragm Structure</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9495737&Exemplar=1&LAN=DE A1 Zheng, Yu A1 Zhang, Sen A1 Chen, Deyong A1 Wang, Junbo A1 Chen, Jian YR 2021 SN 2167-0021 K1 Vibrations K1 Q-factor K1 Sensitivity K1 Resonant frequency K1 Interference K1 Vibration measurement K1 Numerical simulation K1 Resonant low-pressure sensor K1 Modal interference K1 Island-diaphragm structure K1 High quality factors K1 Anodic bonding SP 1243 OP 1246 LK http://dx.doi.org/https://doi.org/10.1109/Transducers50396.2021.9495737 DO https://doi.org/10.1109/Transducers50396.2021.9495737 SF ELIB - SuUB Bremen
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