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1 Ergebnisse
1
Ultra-Small Pixel IR Sensing Array Fabricated with a Post-C..:
, In:
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
,
Zhou, Wenhan
;
Zhang, Haozhi
;
Xue, Dan
... - p. 589-592 , 2021
Link:
https://doi.org/10.1109/Transducers50396.2021.9495752
RT T1 <cTitle>2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)</cTitle>: T1 <Title>Ultra-Small Pixel IR Sensing Array Fabricated with a Post-CMOS Compatible Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9495752&Exemplar=1&LAN=DE A1 Zhou, Wenhan A1 Zhang, Haozhi A1 Xue, Dan A1 Li, Wei A1 Ni, Zao A1 Li, Xinxin YR 2021 SN 2167-0021 K1 Performance evaluation K1 Micromechanical devices K1 Transducers K1 Manufacturing processes K1 Fill factor (solar cell) K1 Films K1 Detectors K1 Infrared sensing array K1 thermopile K1 Post-CMOS compatible SP 589 OP 592 LK http://dx.doi.org/https://doi.org/10.1109/Transducers50396.2021.9495752 DO https://doi.org/10.1109/Transducers50396.2021.9495752 SF ELIB - SuUB Bremen
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