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1 Ergebnisse
1
Area-Selective MOCVD Synthesis of VO2(B) and VO2(M) Phases ..:
, In:
2021 IEEE 22nd International Conference of Young Professionals in Electron Devices and Materials (EDM)
,
Lysenko, Nikita I.
;
Mutilin, Sergey V.
;
Prinz, Victor Ya.
... - p. 79-82 , 2021
Link:
https://doi.org/10.1109/EDM52169.2021.9507670
RT T1
2021 IEEE 22nd International Conference of Young Professionals in Electron Devices and Materials (EDM)
: T1
Area-Selective MOCVD Synthesis of VO2(B) and VO2(M) Phases on a Si Substrate
UL https://suche.suub.uni-bremen.de/peid=ieee-9507670&Exemplar=1&LAN=DE A1 Lysenko, Nikita I. A1 Mutilin, Sergey V. A1 Prinz, Victor Ya. A1 Yakovkina, Lyubov V. A1 Kichay, Vadim N. A1 Shayapov, Vladimir R. YR 2021 SN 2325-419X K1 Semiconductor device measurement K1 X-ray scattering K1 Phase measurement K1 Films K1 Surface morphology K1 Vanadium K1 Silicon K1 VO2 K1 VO2(B) K1 area-selective synthesis K1 CVD K1 vanadyl acetylacetonate K1 PVA SP 79 OP 82 LK http://dx.doi.org/https://doi.org/10.1109/EDM52169.2021.9507670 DO https://doi.org/10.1109/EDM52169.2021.9507670 SF ELIB - SuUB Bremen
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