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1 Ergebnisse
1
Aluminum Oxide Thin Film Passivation Prepared by VHF-PEALD ..:
, In:
2021 IEEE 3rd Eurasia Conference on Biomedical Engineering, Healthcare and Sustainability (ECBIOS)
,
Lin, Jia-Hao
;
Wu, Hung-Wei
;
Chen, You-Sian
... - p. 255-258 , 2021
Link:
https://doi.org/10.1109/ECBIOS51820.2021.9510579
RT T1 <cTitle>2021 IEEE 3rd Eurasia Conference on Biomedical Engineering, Healthcare and Sustainability (ECBIOS)</cTitle>: T1 <Title>Aluminum Oxide Thin Film Passivation Prepared by VHF-PEALD and Its Application of Light-Induced µm-Particle Screening Biochip</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9510579&Exemplar=1&LAN=DE A1 Lin, Jia-Hao A1 Wu, Hung-Wei A1 Chen, You-Sian A1 Hung, Cheng-Yuan A1 Tien, Wei-Chen A1 Liu, Shih-Kun A1 Wey, Tzuu-Shaang YR 2021 K1 Atomic measurements K1 Atomic force microscopy K1 Transmission electron microscopy K1 Atomic layer deposition K1 Force K1 Surface roughness K1 Rough surfaces K1 VHF K1 PEALD K1 aluminum oxide K1 biochip K1 particles SP 255 OP 258 LK http://dx.doi.org/https://doi.org/10.1109/ECBIOS51820.2021.9510579 DO https://doi.org/10.1109/ECBIOS51820.2021.9510579 SF ELIB - SuUB Bremen
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