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1
Field-Effect Passivation of Lossy Interfaces in High-Resist..:
, In:
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS)
,
Rack, Martin
;
Nyssens, Lucas
;
Nabet, Massinissa
.. - p. 1-4 , 2021
Link:
https://doi.org/10.1109/EuroSOI-ULIS53016.2021.9560697
RT T1
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS)
: T1
Field-Effect Passivation of Lossy Interfaces in High-Resistivity RF Silicon Substrates
UL https://suche.suub.uni-bremen.de/peid=ieee-9560697&Exemplar=1&LAN=DE A1 Rack, Martin A1 Nyssens, Lucas A1 Nabet, Massinissa A1 Lederer, Dimitri A1 Raskin, Jean-Pierre YR 2021 SN 2472-9132 K1 Radio frequency K1 Surface impedance K1 Power measurement K1 Linearity K1 Conductivity K1 Silicon K1 Loss measurement K1 Substrate losses K1 substrate linearity K1 effective resistivity K1 parasitic surface conduction K1 interface passivation SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/EuroSOI-ULIS53016.2021.9560697 DO https://doi.org/10.1109/EuroSOI-ULIS53016.2021.9560697 SF ELIB - SuUB Bremen
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