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Recessed multi-gate SOI MOSFET in deep decananometer regime:

, In: 2001 IEEE International SOI Conference. Proceedings (Cat. No.01CH37207),
Jvi-Tsong Lin ; Shih-chang Chang ; Kuo-ying Huang.. - p. 47,48 , 2001
Link: https://doi.org/10.1109/SOIC.2001.957978