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Scaling ferroelectric HZO thickness for low power Ge MFS-FT..:

, In: ESSDERC 2021 - IEEE 51st European Solid-State Device Research Conference (ESSDERC),
Siannas, Nikitas ; Zacharaki, Christina ; Tsipas, Polychronis... - p. 287-290 , 2021
Link: https://doi.org/10.1109/ESSDERC53440.2021.9631382