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1 Ergebnisse
1
Comparison of Electrical Performance of Co-Integrated Forks..:
, In:
2021 IEEE International Electron Devices Meeting (IEDM)
,
Ritzenthaler, R.
;
Mertens, H.
;
Eneman, G.
... - p. 26.2.1-26.2.4 , 2021
Link:
https://doi.org/10.1109/IEDM19574.2021.9720524
RT T1 <cTitle>2021 IEEE International Electron Devices Meeting (IEDM)</cTitle>: T1 <Title>Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9720524&Exemplar=1&LAN=DE A1 Ritzenthaler, R. A1 Mertens, H. A1 Eneman, G. A1 Simoen, E. A1 Bury, E. A1 Eyben, P. A1 Bufler, F. M. A1 Oniki, Y. A1 Briggs, B. A1 Chan, B.T. A1 Hikavyy, A. A1 Mannaert, G. A1 Parvais, B. A1 Chasin, A. A1 Mitard, J. A1 Litta, E. Dentoni A1 Samavedam, S. A1 Horiguchi, N. YR 2021 SN 2156-017X K1 Temperature K1 Systematics K1 Semiconductor device reliability K1 Logic gates K1 Low-frequency noise K1 Dielectrics K1 Temperature control SP 26.2.1 OP 26.2.4 LK http://dx.doi.org/https://doi.org/10.1109/IEDM19574.2021.9720524 DO https://doi.org/10.1109/IEDM19574.2021.9720524 SF ELIB - SuUB Bremen
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