I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Source/Drain Engineering by Tantalum Nitride (TaNx) Electro..:

, In: 2021 IEEE International Electron Devices Meeting (IEDM),
Okuno, N. ; Sato, Y. ; Jimbo, Y.... - p. 37.5.1-37.5.4 , 2021
Link: https://doi.org/10.1109/IEDM19574.2021.9720629