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A Back Illuminated 6 µm SPAD Pixel Array with High PDE and ..:

, In: 2021 IEEE International Electron Devices Meeting (IEDM),
Shimada, S. ; Otake, Y. ; Yoshida, S.... - p. 20.1.1-20.1.4 , 2021
Link: https://doi.org/10.1109/IEDM19574.2021.9720639