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1 Ergebnisse
1
Buried Power Rail Metal exploration towards the 1 nm Node:
, In:
2021 IEEE International Electron Devices Meeting (IEDM)
,
Gupta, A.
;
Radisic, D.
;
Maes, J. W.
... - p. 22.5.1-22.5.4 , 2021
Link:
https://doi.org/10.1109/IEDM19574.2021.9720684
RT T1 <cTitle>2021 IEEE International Electron Devices Meeting (IEDM)</cTitle>: T1 <Title>Buried Power Rail Metal exploration towards the 1 nm Node</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9720684&Exemplar=1&LAN=DE A1 Gupta, A. A1 Radisic, D. A1 Maes, J. W. A1 Pedreira, O. Varela A1 Soulie, J-P. A1 Jourdan, N. A1 Mertens, H. A1 Bandyopadhyay, S. A1 Le, Q. T. A1 Pacco, A. A1 Heylen, N. A1 Vandersmissen, K. A1 Devriendt, K. A1 Zhu, C. A1 Datta, S. A1 Sebaai, F. A1 Wang, S. A1 Mousa, M. A1 Lee, J. A1 Geypen, J. A1 De Wachter, B. A1 Chehab, B. A1 Salahuddin, S. M. A1 Murdoch, G. A1 Biesemans, S. A1 Tokei, Zs. A1 Litta, E. Dentoni A1 Horiguchi, N. YR 2021 SN 2156-017X K1 Rails K1 Electromigration K1 Metallization K1 Tungsten K1 Conductivity K1 Contact resistance K1 Business process re-engineering SP 22.5.1 OP 22.5.4 LK http://dx.doi.org/https://doi.org/10.1109/IEDM19574.2021.9720684 DO https://doi.org/10.1109/IEDM19574.2021.9720684 SF ELIB - SuUB Bremen
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