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Inspection and metrology challenges for 3 nm node devices a..:

, In: 2021 IEEE International Electron Devices Meeting (IEDM),
Shohjoh, T. ; Ikota, M. ; Isawa, M.... - p. 3.3.1-3.3.4 , 2021
Link: https://doi.org/10.1109/IEDM19574.2021.9720711