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1 Ergebnisse
1
Mechanism and Data-based Hybrid Model for Czochralski Silic..:
, In:
2021 China Automation Congress (CAC)
,
Ren, Jun-Chao
;
Liu, Ding
;
Yang, Hao-Peng
- p. 2594-2599 , 2021
Link:
https://doi.org/10.1109/CAC53003.2021.9728157
RT T1
2021 China Automation Congress (CAC)
: T1
Mechanism and Data-based Hybrid Model for Czochralski Silicon Single Crystal Growth Process
UL https://suche.suub.uni-bremen.de/peid=ieee-9728157&Exemplar=1&LAN=DE A1 Ren, Jun-Chao A1 Liu, Ding A1 Yang, Hao-Peng YR 2021 SN 2688-0938 K1 Crystal growth K1 Simulation K1 Crystals K1 Predictive models K1 Feature extraction K1 Prediction algorithms K1 Hydrodynamics K1 CZ silicon single crystal K1 crystal diameter K1 mechanism model K1 SAE-ELM K1 hybrid modeling method SP 2594 OP 2599 LK http://dx.doi.org/https://doi.org/10.1109/CAC53003.2021.9728157 DO https://doi.org/10.1109/CAC53003.2021.9728157 SF ELIB - SuUB Bremen
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