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1 Ergebnisse
1
First order correction of EELS measurements based on experi..:
, In:
2022 IEEE 19th Annual Workshop on Microelectronics and Electron Devices (WMED)
,
Liao, Yougui
;
Goodwin, Rob
;
Harlow, Wayne
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/WMED55302.2022.9758034
RT T1
2022 IEEE 19th Annual Workshop on Microelectronics and Electron Devices (WMED)
: T1
First order correction of EELS measurements based on experimental ADF imaging
UL https://suche.suub.uni-bremen.de/peid=ieee-9758034&Exemplar=1&LAN=DE A1 Liao, Yougui A1 Goodwin, Rob A1 Harlow, Wayne A1 Sorensen, Curt A1 Kari, Tom A1 Miller, Aaron A1 Wilkin, Robert A1 Williams, Scott YR 2022 SN 1947-3842 K1 Semiconductor device measurement K1 Spectroscopy K1 Transmission electron microscopy K1 Microscopy K1 Scattering K1 Random access memory K1 Failure analysis K1 Thickness Variation K1 Electron Scattering K1 Theoretical Modeling K1 EELS K1 Accuracy K1 Correction SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/WMED55302.2022.9758034 DO https://doi.org/10.1109/WMED55302.2022.9758034 SF ELIB - SuUB Bremen
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