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1 Ergebnisse
1
Impact of Stack Structure Control and Ferroelectric Materia..:
, In:
2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)
,
Ali, T.
;
Mertens, K.
;
Olivo, R.
... - p. 1-2 , 2022
Link:
https://doi.org/10.1109/VLSI-TSA54299.2022.9771003
RT T1 <cTitle>2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)</cTitle>: T1 <Title>Impact of Stack Structure Control and Ferroelectric Material Optimization in Novel Laminate HSO and HZO MFMIS FeFET</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9771003&Exemplar=1&LAN=DE A1 Ali, T. A1 Mertens, K. A1 Olivo, R. A1 Lehninger, D. A1 Lederer, M. A1 Muller, F. A1 Rudolph, M. A1 Oehler, S. A1 Kuhnel, K. A1 Hoffmann, R. A1 Schramm, P. A1 Czernohorsky, M. A1 Kampfe, T. A1 Seidel, K. YR 2022 K1 Low voltage K1 Annealing K1 Lamination K1 Materials reliability K1 Crystallization K1 Benchmark testing K1 Very large scale integration SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/VLSI-TSA54299.2022.9771003 DO https://doi.org/10.1109/VLSI-TSA54299.2022.9771003 SF ELIB - SuUB Bremen
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