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Crystalline Gallium Nitride Deposition by RF-Biased Atomic ..:

, In: 2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA),
McLeod, Aaron J. ; Ueda, Scott T. ; Spiegelman, Jeff. - p. 1-2 , 2022
Link: https://doi.org/10.1109/VLSI-TSA54299.2022.9771023