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Study on Y2O3 based gate oxide Si MOS with various annealin..:

, In: 2022 8th International Conference on Applied System Innovation (ICASI),
Yen, Chih-Feng ; Hsu, Hung-Chang ; Huang, Yu-Ya. - p. 111-114 , 2022
Link: https://doi.org/10.1109/ICASI55125.2022.9774449