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1 Ergebnisse
1
Study of Plasma Ash Rate Enhancement by Machine Learning Mo..:
, In:
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Jheng, Shao-Lou
;
Wu, Jyunhong
;
Yang, Zusing
... - p. 1-4 , 2021
Link:
https://doi.org/10.1109/ASMC51741.2021.9774980
RT T1 <cTitle>2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Study of Plasma Ash Rate Enhancement by Machine Learning Models for TAT Improvement</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9774980&Exemplar=1&LAN=DE A1 Jheng, Shao-Lou A1 Wu, Jyunhong A1 Yang, Zusing A1 Chiu, Yuan-Chieh A1 Wu, Ming-Tsung A1 Lee, Hong-Ji A1 Lian, Nan-Tzu A1 Yang, Tahone A1 Chen, Kuang-Chao A1 Lu, Chih-Yuan YR 2021 SN 2376-6697 K1 Training K1 Support vector machines K1 Fitting K1 Ash K1 Artificial neural networks K1 Machine learning K1 Semiconductor device manufacture K1 Machine Learning K1 NN K1 SVR K1 Ash rate SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC51741.2021.9774980 DO https://doi.org/10.1109/ASMC51741.2021.9774980 SF ELIB - SuUB Bremen
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