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Modular Probecard-Measurement Equipment for Automated Wafer..:

, In: 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL),
Weidlich, Sebastian ; Forke, Roman ; Hiller, Karla... - p. 1-4 , 2022
Link: https://doi.org/10.1109/INERTIAL53425.2022.9787750