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1
The BDRIE-HS* Technology Approach for Tiny Motion Detection..:
, In:
2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
,
Forke, Roman
;
Hiller, Karla
;
Hahn, Susann
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/INERTIAL53425.2022.9787762
RT T1 <cTitle>2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)</cTitle>: T1 <Title>The BDRIE-HS* Technology Approach for Tiny Motion Detection with Improved Sensitivity and Noise Performance</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9787762&Exemplar=1&LAN=DE A1 Forke, Roman A1 Hiller, Karla A1 Hahn, Susann A1 Shaporin, Alexey A1 Weidlich, Sebastian A1 Bulz, Daniel A1 Kuchler, Matthias A1 Reuter, Danny A1 Helke, Christian A1 Wunsch, Dirk A1 Gottfried, Knut A1 Kuhn, Harald YR 2022 SN 2377-3480 K1 Vibrations K1 Micromechanical devices K1 Sensitivity K1 Inertial sensors K1 Sensor phenomena and characterization K1 Motion detection K1 Gyroscopes K1 MEMS K1 capacitive sensors K1 cavity-SOI K1 HAR K1 ARDE K1 2-axis K1 sensor K1 acceleration K1 vibration K1 gyroscope SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/INERTIAL53425.2022.9787762 DO https://doi.org/10.1109/INERTIAL53425.2022.9787762 SF ELIB - SuUB Bremen
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