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Applying Hybrid Bonding Technique to Manufacture A Peristal..:

, In: 2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS),
Anh Vo, Tuan Ngoc ; Chen, Pin-Chuan ; Chen, Yu-Hsiang - p. 1-5 , 2022
Link: https://doi.org/10.1109/NEMS54180.2022.9791205