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1 Ergebnisse
1
A Metal Gate Height Variation Control Method by the Metal G..:
, In:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Tu, Wutao
;
Wang, Yan
;
Qiu, Jing
. - p. 1-4 , 2022
Link:
https://doi.org/10.1109/ASMC54647.2022.9792474
RT T1
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
A Metal Gate Height Variation Control Method by the Metal Gate Etch at the FinFET Technology
UL https://suche.suub.uni-bremen.de/peid=ieee-9792474&Exemplar=1&LAN=DE A1 Tu, Wutao A1 Wang, Yan A1 Qiu, Jing A1 Zhang, Haiyang YR 2022 SN 2376-6697 K1 Temperature sensors K1 Resistance K1 Sensitivity K1 Films K1 Metals K1 Logic gates K1 Semiconductor device manufacture K1 Metal Gate Height K1 Plasma K1 Hydra SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC54647.2022.9792474 DO https://doi.org/10.1109/ASMC54647.2022.9792474 SF ELIB - SuUB Bremen
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