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1 Ergebnisse
1
Real-time vacuum leak detection technology to calculate vac..:
, In:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Jeong, Jaepyo
;
Ha, Taekyung
;
Ji, Hyojeong
. - p. 1-4 , 2022
Link:
https://doi.org/10.1109/ASMC54647.2022.9792477
RT T1 <cTitle>2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Real-time vacuum leak detection technology to calculate vacuum leak parameters for dry stripping : EO: Equipment Optimization</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9792477&Exemplar=1&LAN=DE A1 Jeong, Jaepyo A1 Ha, Taekyung A1 Ji, Hyojeong A1 Yoon, Sung Jin YR 2022 SN 2376-6697 K1 Productivity K1 Strips K1 Interpolation K1 Vacuum technology K1 Semiconductor device manufacture K1 Real-time systems K1 Leak detection K1 Real-time vacuum leak detection K1 PR dry strip K1 Leak-dependent parameters SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC54647.2022.9792477 DO https://doi.org/10.1109/ASMC54647.2022.9792477 SF ELIB - SuUB Bremen
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