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1 Ergebnisse
1
Predictive Maintenance Practices for Cryogenic Pumps in Sem..:
, In:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Collart, Erik
;
Longley, Andrew
;
Gordon, Dirk
.. - p. 1-6 , 2022
Link:
https://doi.org/10.1109/ASMC54647.2022.9792482
RT T1 <cTitle>2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Predictive Maintenance Practices for Cryogenic Pumps in Semiconductor Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9792482&Exemplar=1&LAN=DE A1 Collart, Erik A1 Longley, Andrew A1 Gordon, Dirk A1 Nordquist, John A1 Matthews, Paul YR 2022 SN 2376-6697 K1 Measurement K1 Uncertainty K1 Vacuum systems K1 Pumps K1 Cryogenics K1 Semiconductor device manufacture K1 Data models K1 Vacuum pumps K1 Predictive Maintenance K1 PdM K1 cryo pumps K1 Smart Manufacturing K1 Human-In-The-Loop K1 Machine Learning SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ASMC54647.2022.9792482 DO https://doi.org/10.1109/ASMC54647.2022.9792482 SF ELIB - SuUB Bremen
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