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An advanced Bragg diffraction imaging technique to characte..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Tran Thi Caliste, Thu Nhi ; Kirste, Lutz ; Drouin, Alexis. - p. 1-2 , 2022
Link: https://doi.org/10.1109/ASMC54647.2022.9792499