I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
An advanced Bragg diffraction imaging technique to characte..:
, In:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Tran Thi Caliste, Thu Nhi
;
Kirste, Lutz
;
Drouin, Alexis
. - p. 1-2 , 2022
Link:
https://doi.org/10.1109/ASMC54647.2022.9792499
RT T1
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
An advanced Bragg diffraction imaging technique to characterize defects in SiC and GaN : Topic/category, e.g. AM: Advanced Metrology
UL https://suche.suub.uni-bremen.de/peid=ieee-9792499&Exemplar=1&LAN=DE A1 Tran Thi Caliste, Thu Nhi A1 Kirste, Lutz A1 Drouin, Alexis A1 Baruchel, Jose YR 2022 SN 2376-6697 K1 Silicon carbide K1 Diffraction K1 Imaging K1 Europe K1 Crystals K1 X-ray diffraction K1 Semiconductor device manufacture SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/ASMC54647.2022.9792499 DO https://doi.org/10.1109/ASMC54647.2022.9792499 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)