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In-situ Cleaning of Post-etch Byproducts by Manipulating De..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Yang, Ki Dong ; Park, Hanbit ; Lee, Joonho H.... - p. 1-4 , 2022
Link: https://doi.org/10.1109/ASMC54647.2022.9792508