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3D NAND vertical channel defect inspection and classificati..:

, In: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Wu, Cheng Hung ; Sun, Yen Chun Chuan ; Kushwaha, Rishabh.. - p. 1-4 , 2022
Link: https://doi.org/10.1109/ASMC54647.2022.9792511