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1 Ergebnisse
1
Multiphased Process Optimization for CMP Variation Reductio..:
, In:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
McCabe, Russell
;
Chaudhuri, Ritesh Ray
;
Spangler, Samantha
... - p. 1-3 , 2022
Link:
https://doi.org/10.1109/ASMC54647.2022.9792519
RT T1 <cTitle>2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Multiphased Process Optimization for CMP Variation Reduction in High Volume Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9792519&Exemplar=1&LAN=DE A1 McCabe, Russell A1 Chaudhuri, Ritesh Ray A1 Spangler, Samantha A1 Kerstetter, Lauren A1 Aborisade, Femi A1 Hoech, Raita YR 2022 SN 2376-6697 K1 Costs K1 Manufacturing processes K1 Process control K1 Semiconductor device manufacture K1 Product design K1 Quality assessment K1 Manufacturing K1 CMP K1 Cost K1 Rework K1 Underpolish SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ASMC54647.2022.9792519 DO https://doi.org/10.1109/ASMC54647.2022.9792519 SF ELIB - SuUB Bremen
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