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1 Ergebnisse
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Computational overlay as enabler for enhanced on-product ov..:
, In:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
van Dijk, Leon
;
Adal, Kedir M.
;
Golmakaniyoon, Sepideh
... - p. 1-6 , 2022
Link:
https://doi.org/10.1109/ASMC54647.2022.9792531
RT T1 <cTitle>2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Computational overlay as enabler for enhanced on-product overlay control</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9792531&Exemplar=1&LAN=DE A1 van Dijk, Leon A1 Adal, Kedir M. A1 Golmakaniyoon, Sepideh A1 Le-Gratiet, Bertrand A1 Haque, Niyam A1 Sahraeian, Reza A1 Lam, Auguste A1 van Haren, Richard YR 2022 SN 2376-6697 K1 Computational modeling K1 Process control K1 Machine learning K1 Semiconductor device manufacture K1 Metrology K1 Logic gates K1 overlay K1 virtual metrology K1 process control K1 excursion detection K1 machine learning SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ASMC54647.2022.9792531 DO https://doi.org/10.1109/ASMC54647.2022.9792531 SF ELIB - SuUB Bremen
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