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1 Ergebnisse
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A perspective of MIM defect density performance improvement..:
, In:
2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Khor, Ee Jan
;
Sun, Jian Xun
;
Thant, Zin Tun
... - p. 1-3 , 2022
Link:
https://doi.org/10.1109/ASMC54647.2022.9792534
RT T1 <cTitle>2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>A perspective of MIM defect density performance improvement for automotive chip fabrication</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9792534&Exemplar=1&LAN=DE A1 Khor, Ee Jan A1 Sun, Jian Xun A1 Thant, Zin Tun A1 Chockalingam, Ramasamy A1 Hsu, Wei-Hui A1 Somasuntharam, Pannirselvam A1 Yew, Kwang Sing A1 Yap, Hin Kiong A1 Tan, Juan Boon YR 2022 SN 2376-6697 K1 Performance evaluation K1 Fabrication K1 Electric breakdown K1 Failure analysis K1 Semiconductor device manufacture K1 Insulators K1 MIM capacitors K1 Metal-Insulator-Metal K1 MIM K1 Automotive K1 Defect reduction K1 Cu Hillock SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ASMC54647.2022.9792534 DO https://doi.org/10.1109/ASMC54647.2022.9792534 SF ELIB - SuUB Bremen
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