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1
Development of MEMS Structures for Miniature Organic Rankin..:
, In:
2022 International Conference on Electronics Packaging (ICEP)
,
Kaneko, M.
;
Takeda, K.
;
Aibara, M.
. - p. 93-94 , 2022
Link:
https://doi.org/10.23919/ICEP55381.2022.9795548
RT T1 <cTitle>2022 International Conference on Electronics Packaging (ICEP)</cTitle>: T1 <Title>Development of MEMS Structures for Miniature Organic Rankine Cycle System</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9795548&Exemplar=1&LAN=DE A1 Kaneko, M. A1 Takeda, K. A1 Aibara, M. A1 Uchikoba, F. YR 2022 K1 Micromechanical devices K1 Resistance K1 Millimeter wave devices K1 Wires K1 Windings K1 Velocity control K1 Silicon K1 MEMS K1 turbine K1 flow path K1 organic Rankine cycle K1 low temperature waste heat energy SP 93 OP 94 LK http://dx.doi.org/https://doi.org/10.23919/ICEP55381.2022.9795548 DO https://doi.org/10.23919/ICEP55381.2022.9795548 SF ELIB - SuUB Bremen
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