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1 Ergebnisse
1
First demonstration of flexible poly-Si nano-FETs (W/Lg= 50..:
, In:
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Hou, Po-Cheng
;
Huang, Wen-Hsien
;
Kao, Ming-Hsuan
... - p. 179-181 , 2022
Link:
https://doi.org/10.1109/EDTM53872.2022.9797921
RT T1 <cTitle>2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>First demonstration of flexible poly-Si nano-FETs (W/Lg= 50/80 nm) on the polyimide utilizing multi-wavelength laser annealing assisted by laser-buffer layer</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9797921&Exemplar=1&LAN=DE A1 Hou, Po-Cheng A1 Huang, Wen-Hsien A1 Kao, Ming-Hsuan A1 Chen, Shih-Wei A1 Wang, Hsing-Hsiang A1 Shen, Chang-Hong A1 Shieh, Jia-Min A1 Pan, Fu-Ming A1 Chang, Li YR 2022 K1 Fabrication K1 Resistance K1 Reflectivity K1 Annealing K1 Lasers K1 Measurement by laser beam K1 Polyimides K1 laser-buffer layer K1 ultraviolet laser K1 CO2 laser K1 flexible K1 nano-FETs K1 bending SP 179 OP 181 LK http://dx.doi.org/https://doi.org/10.1109/EDTM53872.2022.9797921 DO https://doi.org/10.1109/EDTM53872.2022.9797921 SF ELIB - SuUB Bremen
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