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1 Ergebnisse
1
Surface Modulation of SiGe by Hydrogen Plasma Process with ..:
, In:
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Ishii, Yohei
;
Sugano, Ryoko
;
Lee, Yao-Jen
... - p. 345-347 , 2022
Link:
https://doi.org/10.1109/EDTM53872.2022.9797937
RT T1 <cTitle>2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Surface Modulation of SiGe by Hydrogen Plasma Process with Site Exchange Mechanism between Si and Ge</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9797937&Exemplar=1&LAN=DE A1 Ishii, Yohei A1 Sugano, Ryoko A1 Lee, Yao-Jen A1 Wu, Wen-Fa A1 Maeda, Kenji A1 Miura, Makoto YR 2022 K1 Location awareness K1 Hydrogen K1 Modulation K1 Germanium K1 Plasma measurements K1 Silicon K1 Plasmas K1 Plasma K1 Dry Etch K1 Segregation and SiGe SP 345 OP 347 LK http://dx.doi.org/https://doi.org/10.1109/EDTM53872.2022.9797937 DO https://doi.org/10.1109/EDTM53872.2022.9797937 SF ELIB - SuUB Bremen
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