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1 Ergebnisse
1
Investigation on Polarization and Trapping Dominated Reliab..:
, In:
2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
,
Hong, Tzu-Chieh
;
Su, Chun-Jung
;
Lee, Yao-Jen
... - p. 241-243 , 2022
Link:
https://doi.org/10.1109/EDTM53872.2022.9798106
RT T1 <cTitle>2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)</cTitle>: T1 <Title>Investigation on Polarization and Trapping Dominated Reliability for Ferroelectric-HfZrOx Ge FinFET Inverters</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9798106&Exemplar=1&LAN=DE A1 Hong, Tzu-Chieh A1 Su, Chun-Jung A1 Lee, Yao-Jen A1 Li, Yiming A1 Samukawa, Seiji A1 Chao, Tien-Sheng YR 2022 K1 Performance evaluation K1 Voltage K1 Germanium K1 FinFETs K1 Inverters K1 Time measurement K1 Etching K1 ferroelectric K1 Ge CMOS K1 FinFET K1 NBE SP 241 OP 243 LK http://dx.doi.org/https://doi.org/10.1109/EDTM53872.2022.9798106 DO https://doi.org/10.1109/EDTM53872.2022.9798106 SF ELIB - SuUB Bremen
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