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The Extension of the FinFET Generation Towards Sub-3nm: The..:

, In: 2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM),
Chung, Steve S. ; Chiang, C. K. ; Pai, H... - p. 15-17 , 2022
Link: https://doi.org/10.1109/EDTM53872.2022.9798277