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1
Modeling and control of thin film morphology using unsteady..:
, In:
Proceedings of the 40th IEEE Conference on Decision and Control (Cat. No.01CH37228)
,
Gallivan, M.A.
;
Goodwin, D.G.
;
Murray, R.M.
- p. 1570,1571,1572,1573,1574,1575,1576 , 2001
Link:
https://doi.org/10.1109/CDC.2001.981122
RT T1
Proceedings of the 40th IEEE Conference on Decision and Control (Cat. No.01CH37228)
: T1
Modeling and control of thin film morphology using unsteady processing parameters: Problem formulation and initial results
UL https://suche.suub.uni-bremen.de/peid=ieee-981122&Exemplar=1&LAN=DE A1 Gallivan, M.A. A1 Goodwin, D.G. A1 Murray, R.M. YR 2001 K1 Transistors K1 Morphology K1 Thin film circuits K1 Sputtering K1 Electrical equipment industry K1 Industrial control K1 Manufacturing industries K1 Control theory K1 Size control K1 Integrated circuit manufacture SP 1570,1571,1572,1573,1574,1575,1576 LK http://dx.doi.org/https://doi.org/10.1109/CDC.2001.981122 DO https://doi.org/10.1109/CDC.2001.981122 SF ELIB - SuUB Bremen
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