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Investigation of Plasma Etching Rates of a Methacrylate Res..:

, In: 2022 45th International Spring Seminar on Electronics Technology (ISSE),
Borok, Alexandra ; Gal, David ; Kovacs, Rebeka.. - p. 1-5 , 2022
Link: https://doi.org/10.1109/ISSE54558.2022.9812707