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1 Ergebnisse
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Investigation of Plasma Etching Rates of a Methacrylate Res..:
, In:
2022 45th International Spring Seminar on Electronics Technology (ISSE)
,
Borok, Alexandra
;
Gal, David
;
Kovacs, Rebeka
.. - p. 1-5 , 2022
Link:
https://doi.org/10.1109/ISSE54558.2022.9812707
RT T1
2022 45th International Spring Seminar on Electronics Technology (ISSE)
: T1
Investigation of Plasma Etching Rates of a Methacrylate Resin
UL https://suche.suub.uni-bremen.de/peid=ieee-9812707&Exemplar=1&LAN=DE A1 Borok, Alexandra A1 Gal, David A1 Kovacs, Rebeka A1 Szokol, Agnes Nagyne A1 Bonyar, Attila YR 2022 SN 2161-2536 K1 Microwave measurement K1 Hydrogen K1 Plasma measurements K1 Etching K1 Plasmas K1 Argon K1 Resins SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/ISSE54558.2022.9812707 DO https://doi.org/10.1109/ISSE54558.2022.9812707 SF ELIB - SuUB Bremen
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