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1 Ergebnisse
1
Phase Resolved Plasma Dynamics Of A Capacitively Coupled Pl..:
, In:
2022 IEEE International Conference on Plasma Science (ICOPS)
,
Kim, C.W.
;
Kim, H.H.
;
Shin, J.H.
.. - p. 1-1 , 2022
Link:
https://doi.org/10.1109/ICOPS45751.2022.9812989
RT T1
2022 IEEE International Conference on Plasma Science (ICOPS)
: T1
Phase Resolved Plasma Dynamics Of A Capacitively Coupled Plasma Using Particle Trajectory Analysis
UL https://suche.suub.uni-bremen.de/peid=ieee-9812989&Exemplar=1&LAN=DE A1 Kim, C.W. A1 Kim, H.H. A1 Shin, J.H. A1 Park, G.W. A1 Lee, H.J. YR 2022 SN 2576-7208 K1 Electrodes K1 Radio frequency K1 Electric potential K1 Monte Carlo methods K1 Energy resolution K1 Graphics processing units K1 Etching SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/ICOPS45751.2022.9812989 DO https://doi.org/10.1109/ICOPS45751.2022.9812989 SF ELIB - SuUB Bremen
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