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Atmospheric HF vapor based silicon etching with Pt catalyst..:

, In: 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC),
Hwang, Sunghyun ; Carr, William N. ; Yoon, Yong-Kyu - p. 898-902 , 2022
Link: https://doi.org/10.1109/ECTC51906.2022.00146