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Recess Effect Study and Process Optimization of Sub-10 μm P..:

, In: 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC),
Ren, Haoxiang ; Yang, Yu-Tao ; Iyer, Subramanian S. - p. 149-156 , 2022
Link: https://doi.org/10.1109/ECTC51906.2022.00034