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1 Ergebnisse
1
Yield Improvement in Chip to Wafer Hybrid Bonding:
, In:
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
,
Choong Chong, Ser
;
Cereno Daniel, Ismael
;
Lim Pei Siang, Sharon
... - p. 1982-1986 , 2022
Link:
https://doi.org/10.1109/ECTC51906.2022.00311
RT T1
2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
: T1
Yield Improvement in Chip to Wafer Hybrid Bonding
UL https://suche.suub.uni-bremen.de/peid=ieee-9816495&Exemplar=1&LAN=DE A1 Choong Chong, Ser A1 Cereno Daniel, Ismael A1 Lim Pei Siang, Sharon A1 Shim Cheng Yi, Joseph A1 Lai Wai Song, Alvin A1 Leng Loh, Woon YR 2022 SN 2377-5726 K1 Wafer bonding K1 Merging K1 Surface roughness K1 Cleaning K1 Silicon K1 Rough surfaces K1 Bonding K1 Hybrid bonding K1 chip to wafer bonding K1 passivation K1 protective layer K1 and surface roughness SP 1982 OP 1986 LK http://dx.doi.org/https://doi.org/10.1109/ECTC51906.2022.00311 DO https://doi.org/10.1109/ECTC51906.2022.00311 SF ELIB - SuUB Bremen
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