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8-Layer 3D Vertical Ru/AlOxNy/TiN RRAM with Mega-Ω Level LR..:

, In: 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits),
Qin, Shengjun ; Tung, Maryann ; Belliveau, Emma... - p. 314-315 , 2022