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1 Ergebnisse
1
First Monolithic Integration of Group IV Waveguide Photodet..:
, In:
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
,
Wang, Haibo
;
Zhang, Gong
;
Chen, Yue
... - p. 407-408 , 2022
Link:
https://doi.org/10.1109/VLSITechnologyandCir46769.2022..
RT T1
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
: T1
First Monolithic Integration of Group IV Waveguide Photodetectors and Modulators on 300 mm Si Substrates for 2-μm Wavelength Optoelectronic Integrated Circuit
UL https://suche.suub.uni-bremen.de/peid=ieee-9830294&Exemplar=1&LAN=DE A1 Wang, Haibo A1 Zhang, Gong A1 Chen, Yue A1 Zhang, Jishen A1 Han, Kaizhen A1 Huang, Yi-Chiau A1 Gong, Xiao YR 2022 SN 2158-9682 K1 Electro-absorption modulators K1 Optical device fabrication K1 Couplers K1 Optical imaging K1 Silicon K1 Optical coupling K1 Gratings K1 2 μm integration platform K1 waveguide GeSn/Ge PD K1 waveguide GeSn/Ge EAM K1 optoelectronic integration SP 407 OP 408 LK http://dx.doi.org/https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830294 DO https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830294 SF ELIB - SuUB Bremen
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