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In-situ Surface Temperature Monitoring through Wafer Temper..:

, In: 2022 IEEE 2nd International Conference on Electronic Technology, Communication and Information (ICETCI),
Kim, Solbaro ; Oh, Hyun-woo ; Sim, Kwang-bo - p. 228-232 , 2022
Link: https://doi.org/10.1109/ICETCI55101.2022.9832050