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1 Ergebnisse
1
Fixed Charge Induced by Ion Implantation Used to Control th..:
, In:
2022 29th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
,
Sakai, Toshihiko
;
Matsuo, Daisuke
;
Fujiwara, Masaki
... - p. 138-139 , 2022
Link:
https://doi.org/10.23919/AM-FPD54920.2022.9851247
RT T1 <cTitle>2022 29th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)</cTitle>: T1 <Title>Fixed Charge Induced by Ion Implantation Used to Control the Threshold Voltage for Oxide TFTs</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9851247&Exemplar=1&LAN=DE A1 Sakai, Toshihiko A1 Matsuo, Daisuke A1 Fujiwara, Masaki A1 Azuma, Daisuke A1 Setoguchi, Yoshitaka A1 Andoh, Yasunori A1 Takahashi, Eiji A1 Sameshima, Toshiyuki YR 2022 K1 Active matrix technology K1 Ion implantation K1 Conferences K1 Threshold voltage K1 Substrates SP 138 OP 139 LK http://dx.doi.org/https://doi.org/10.23919/AM-FPD54920.2022.9851247 DO https://doi.org/10.23919/AM-FPD54920.2022.9851247 SF ELIB - SuUB Bremen
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