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Estimating the Sensitivity of Microoptoelectromechanical Mi..:

, In: 2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM),

Barbin, Evgenij S. ; Nesterenko, Tamara G. ; Koleda, Aleksej N.... - p. 52-56 , 2022

Link: https://doi.org/10.1109/EDM55285.2022.9855054

RT 
T1 <cTitle>2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM)</cTitle>: T1 <Title>Estimating the Sensitivity of Microoptoelectromechanical Micro-g Accelerometer</Title>

UL https://suche.suub.uni-bremen.de/peid=ieee-9855054&Exemplar=1&LAN=DE
				
A1 Barbin, Evgenij S.
A1 Nesterenko, Tamara G.
A1 Koleda, Aleksej N.
A1 Shesterikov, Evgeniy V.
A1 Kulinich, Ivan V.
A1 Sheyerman, Fedor I.
YR 2022
SN 2325-419X
K1 Accelerometers
K1 Sensitivity
K1 Laser noise
K1 Resonant frequency
K1 Optical variables measurement
K1 Dynamic range
K1 Tunneling
K1 MOEMS-accelerometer
K1 optical measuring transducer
K1 micromechanical structure
K1 noise equivalent acceleration
K1 bandwidth
K1 accelerometer resonance frequency
K1 Q-factor
K1 laser noise
K1 photodiode noise
K1 sensitivity threshold
K1 dynamic range
SP 52
OP 56
LK http://dx.doi.org/https://doi.org/10.1109/EDM55285.2022.9855054
DO https://doi.org/10.1109/EDM55285.2022.9855054
SF ELIB - SuUB Bremen

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