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Preparation of Silicon (111) Surface for Epitaxial Growth o..:

, In: 2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM),
Bashkatov, Dmitriy D. ; Milakhin, Denis S. ; Malin, Timur V.... - p. 1-5 , 2022
Link: https://doi.org/10.1109/EDM55285.2022.9855155