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1 Ergebnisse
1
Film Property Analysis by FTIR on ULK Film Deposition and U..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Cai, Xinchen
;
Teng, Tianjiao
;
Lin, Xuanyu
... - p. 01-04 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856724
RT T1 <cTitle>2022 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Film Property Analysis by FTIR on ULK Film Deposition and UV Curing Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9856724&Exemplar=1&LAN=DE A1 Cai, Xinchen A1 Teng, Tianjiao A1 Lin, Xuanyu A1 Li, Peipei A1 Chen, Xinyi A1 Wang, Zhuo A1 Tan, Huaqiang A1 Mi, Qing A1 Zhang, Bo A1 Liu, Jintao YR 2022 K1 Dielectric constant K1 Capacitance-voltage characteristics K1 Measurement techniques K1 Curing K1 Skeleton K1 Fourier transform infrared spectroscopy K1 Plasmas K1 ultra low-k K1 UV cure K1 FTIR K1 shrinkage K1 dielectric constant SP 01 OP 04 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856724 DO https://doi.org/10.1109/CSTIC55103.2022.9856724 SF ELIB - SuUB Bremen
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