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1 Ergebnisse
1
Effects of Coil Surface Current Density on Plasma Character..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Zeng, Jiangjie
;
Zhang, Qinrui
;
Yu, Jiahong
... - p. 1-4 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856773
RT T1 <cTitle>2022 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Effects of Coil Surface Current Density on Plasma Characteristics in a PECVD Chamber</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9856773&Exemplar=1&LAN=DE A1 Zeng, Jiangjie A1 Zhang, Qinrui A1 Yu, Jiahong A1 Hu, Yongjie A1 Li, Xingyu A1 Zhuang, Shiwei YR 2022 K1 Electric potential K1 Temperature distribution K1 Simulation K1 Production K1 Gaussian distribution K1 Plasmas K1 Current density SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856773 DO https://doi.org/10.1109/CSTIC55103.2022.9856773 SF ELIB - SuUB Bremen
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