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1 Ergebnisse
1
Stitching Process Development on 300mm Wafer CMOS BEOL for ..:
, In:
2022 China Semiconductor Technology International Conference (CSTIC)
,
Li, Ming
;
Kang, Xiaoxu
;
Zang, Kaiyan
- p. 1-3 , 2022
Link:
https://doi.org/10.1109/CSTIC55103.2022.9856864
RT T1 <cTitle>2022 China Semiconductor Technology International Conference (CSTIC)</cTitle>: T1 <Title>Stitching Process Development on 300mm Wafer CMOS BEOL for High Performance Chip Application</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-9856864&Exemplar=1&LAN=DE A1 Li, Ming A1 Kang, Xiaoxu A1 Zang, Kaiyan YR 2022 K1 Semiconductor device measurement K1 CMOS technology SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/CSTIC55103.2022.9856864 DO https://doi.org/10.1109/CSTIC55103.2022.9856864 SF ELIB - SuUB Bremen
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